1.

Conference Proceedings
Conference Proceedings
1. Defects and Failure Modes In PZT Films For A MEMS Microengine
Bahr, D.F ; Crozier, B.T. ; Richards, C.D. ; Richards, R.F.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 657
2.

Conference Proceedings
Conference Proceedings
2. Film Fracture Phenomena During Indentation
Bahr, D.F ; Pang, M. ; Rodriguez-Marek, D.
Pub. info.: Fundamentals of nanoindentation and nanotribology II : symposium held November 28-30, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Penn..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 649