1.

Conference Proceedings
Conference Proceedings
1. Effect of Metal Contamination and Improved Cleaning Strategies
Mertens, P.W. ; Bearda, T. ; Lowewenstein, L.M. ; Martin, A.R. ; Hub, W. ; Kolbesen, B.O. ; Teerlink, I. ; Vos, R. ; Baeyens, M. ; Gendt, S.De ; Kenis, K. ; Heyns, M.M.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.401-413,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1
2.

Conference Proceedings
Conference Proceedings
2. QUANTITATIVE MODELING OF H2O2 DECOMPOSITION IN SC1
Mertens, P. ; Baeyens, M. ; Moyaerts, G. ; Okorn-Schmidt, H. ; Vos, R. ; De Waele, R. ; Hatcher, Z. ; Hub, W. ; De Gendt, S. ; Knotter, M. ; Meuris, M. ; Heyns, M.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.176-183,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
3.

Conference Proceedings
Conference Proceedings
3. Silicon Surface Metal Contamination Measurements Using Grazing-Emission XRF Spectrometry
Gendt, S. de ; Kenis, K. ; Baeyens, M. ; Mertens, P. W. ; Heyns, M. M. ; Wiener, G. ; Kidd, S. J. ; Knotter, D. M. ; Bokx, P. K. de
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.397-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477