1.

Conference Proceedings
Conference Proceedings
1. Hot embossing and injection molding for micro-optical components
Heckele,M. ; Bacher,W. ; Hanemann,T. ; Ulrich,H.
Pub. info.: Precision plastic optics for optical storage, displays, imaging, and communications : 30-31 July 1997, San Diego, California.  pp.24-29,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3135
2.

Conference Proceedings
Conference Proceedings
2. Mass separation using thin PTFE membranes
Rummler,Z. ; Bacher,W. ; Saile,V. ; Schomburg,W.K.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.1014-1021,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
3.

Conference Proceedings
Conference Proceedings
3. Production of movable metallic microstructures by aligned hot embossing and reactive ion etching
Roetting,O. ; Kohler,B. ; Reuther,F.J. ; Blum,H. ; Bacher,W.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.1038-1045,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
4.

Conference Proceedings
Conference Proceedings
4. Injection molding of LIGA and LIGA-similar microstructures using filled and unfilled thermoplastics
Ruprecht,R. ; Bacher,W. ; HauBelt,J.H. ; Piotter,V.
Pub. info.: Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas.  pp.146-157,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2639