1.

Conference Proceedings
Conference Proceedings
1. Advanced procedure to evaluate process performance at very low k1 based on device parameters linked to lithography and process data: ？. Verification of cell layout based on integration of optical and electrical simulations
Balasinski,A. ; Iandolo,W. ; Joshi,D. ; Karklin,L. ; Axelrad,V.
Pub. info.: Optical Microlithography XIV.  4346  pp.1514-1521,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
2.

Conference Proceedings
Conference Proceedings
2. Efficient computational techniques for aerial imaging simulation
Bernard,D.A. ; Li,J. ; Rey,J.C. ; Rouz,K. ; Axelrad,V.
Pub. info.: Optical Microlithography IX.  Part1  pp.273-287,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726