1.

Conference Proceedings
Conference Proceedings
1. Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high-k dielectric film HfO2
Leng,J. ; Li,S. ; Opsal,J.L. ; Aspnes,D.E. ; Lee,B.H. ; Lee,J.C.
Pub. info.: Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA.  pp.228-234,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4099
2.

Conference Proceedings
Conference Proceedings
2. Real-time optical diagnostics for epitaxial growth
Aspnes,D.E. ; Kamiya,I.
Pub. info.: Second Iberoamerican Meeting on Optics : 18-22 September 1995, Guanajuato, México.  pp.306-322,  1996.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2730