Farlow, G. C ; Appleton, B. R ; Boatner, L. A. ; McHargue, C. J. ; White, C. W. ; Clark, G. J,. ; Baglin, J. E. E.
Pub. info.:
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.137-146, 1985. Pittsburgh, Pa.. Materials Research Society
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.171-176, 1985. Pittsburgh, Pa.. Materials Research Society