1.

Conference Proceedings
Conference Proceedings
1. RADIATION DAMAGE INDUCED TRANSIENT ENHANCED DIFFUSION OF DOPANTS IN SILICON
Angelucci, R. ; Gabilli, E. ; Lotti, R. ; Negrini, P. ; Servidori, M. ; Solmi, S. ; Anderle, M.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.505-510,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
2.

Conference Proceedings
Conference Proceedings
2. Reaction Behavior and Deposition Consequences in Conformal CVD by Sub-Atmospheric Ozone/TEOS Processes
Shareef, I.A. ; Rubloff, C.W. ; Anderle, M. ; Gill, W.N. ; Cotte, J.
Pub. info.: AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California.  1994.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1994