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Conference Proceedings

1. He-induced Nanocavities for the Gettering of Metallic Impurities in Silicon

Ntsoenzok, E. ; Delamare, R. ; Alquier, D. ; Liu, C.L. ; Ashok, S. ; Ruault, M.O.

Pub. info.:	High purity silicon VIII : proceedings of the international symposium. pp.202-207, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-05

Conference Proceedings

2. Electrical Defects of Shallow (p+/n) Junctions Formed by Boron Implantation Into Ge-Preamorphized Si Substrates

Alquier, D. ; Benzohra, M. ; Boussaid, F. ; Olivie, F. ; Martinez, A.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.413-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

3. Transient-Enhanced Diffusion of Dopants in Preamorphized Si Layers

Claverie, A. ; Bonafos, C. ; Omri, M. ; Mauduit, B. de ; Assayag, G. Ben ; Martinez, A. ; Alquier, D. ; Mathiot, D.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.3-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

Conference Proceedings

4. On the ｢紜symmetrical｢？Behavior of Transient Enhanced Diffusion in Pre-Amorphized Si Wafers

Alquier, D. ; Cowern, N. E. B. ; Pichler, P. ; Armand, C. ; Martinez, A. ; Mathiot, D. ; Omri, M. ; Claverie, A.

Pub. info.:	Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.67-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	532

Conference Proceedings

5. Boron TED in Pre-Amorphized Si: Role of the A/C Interface

Mathiot, D. ; Bonafos, C. ; Omri, M. ; Alquier, D. ; Martinez, A. ; Claverie, A.

Pub. info.:	Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.55-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	532

Conference Proceedings

6. Electrical Active Defects in the Band-Gap Induced by Ge-Pre-Amorphization of Si-Substrates

Boussaid, F. ; Olivie, F. ; Benzohra, M. ; Alquier, D. ; Claverie, A. ; Martinez, A.

Pub. info.:	Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.85-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	532

Conference Proceedings

7. Defects Induced by Helium Implantation: Interaction with Boron and Phosphorus

Cayrel, F. ; Alquier, D. ; Roqueta, F. ; Ventura, L. ; Dubois, C. ; Mathiot, D.

Pub. info.:	Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.107-114, 2002. Warrendale, Pa. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	719

Conference Proceedings

8. Transient-Enhanced Diffusion of Dopants in Preamorphized Si Layers

Claverie, A. ; Bonafos, C. ; Omri, M. ; Mauduit, B. de ; Assayag, G. Ben ; Martinez, A. ; Alquier, D. ; Mathiot, D.

Pub. info.:	Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.11-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	439

Conference Proceedings

9. Defects Induced by Helium Implantation: Impact on Boron Diffusivity

Cayrel, F. ; Alquier, D. ; Dubois, C. ; Jerisian, R.

Pub. info.:	Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.339-344, 2005. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	864

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Conference Proceedings

10. Impact of Hydrogen Plasma Treatment on Gettering by He Implantation-Induced Cavities in Silicon

Alquier, D. ; Ntsoeazok, E. ; Liu, C.L. ; Vengurlekar, A. ; Ashok, S.

Pub. info.:	Hydrogen in semiconductors : symposium held April 13-14, 2004, San Francisco, California, U.S.A.. pp.55-60, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	813

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Author: Alquier, D.