1.

Conference Proceedings
Conference Proceedings
1. Investigation of second-harmonic generation for SOI wafer metrology
Pasternak, R. ; Jun, B. ; Schrimpf, R.D. ; Fleetwood, D.M. ; Alles, M.A. ; Dolan, R.P. ; Standley, R.W. ; Tolk, N.H.
Pub. info.: Silicon-on-insulator technology and devices XII : proceedings of the international symposium.  pp.383-388,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-03
2.

Conference Proceedings
Conference Proceedings
2. Effects of the Chlorine Concentration in the Anneal Ambient on the Contamination and Surface Microroughness in SIMOX
Anc, MJ. ; Krull, W.A. ; Alles, M.A.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.129-144,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5