1.

Conference Proceedings
Conference Proceedings
1. KrF laser driven xenon plcsrna light source of a small-field exposure tool [6151-133]
Abe T ; Moriya M ; Someya H ; Suganuma T ; Watanabe T ; Sumitani A ; Mizoguchi H
Pub. info.: Emerging Lithographic Technologies X.  pp.61513T-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
2.

Conference Proceedings
Conference Proceedings
2. High power injection lock 6kHz 60W laser for ArF dry/wet lithography [6154-78]
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Suzuki, T. ; Matsunaga, T. ; Sakanish, S. ; Kaminishi, M. ; Watanabe, Y. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M ; Kawasuji, T ; Nogawa, H ; Umeda, H ; Taniguchi, H ; Sasaki, Y ; Kinoshita, J ; Abe T ; Tanaka, H ; Hayashi, H ; Miyao, K ; Niwano, M ; Kurosu, A ; Yashiro, M ; Nagano, H ; Igarashi, T ; Mimura, T ; Kakizaki, K
Pub. info.: Optical Microlithography XIX.  pp.615425-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154