1.

Conference Proceedings

Conference Proceedings
P. Gaubert ; A. Teramoto ; T. Ohmi
Pub. info.: Solid State (General) - 214th ECS Meeting/PRiME 2008.  pp.7-12,  2009.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(40)
2.

Conference Proceedings

Conference Proceedings
W. Cheng ; A. Teramoto ; T. Ohmi
Pub. info.: ULSI process integration 5.  pp.349-355,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(6)
3.

Conference Proceedings

Conference Proceedings
N. Mizutani ; H. Morinaga ; A. Teramoto ; T. Ohmi
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.75-81,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
4.

Conference Proceedings

Conference Proceedings
M. Yamamoto ; K. Nii ; H. Morinaga ; A. Teramoto ; T. Ohmi
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.51-58,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
5.

Conference Proceedings

Conference Proceedings
Y. Watanabe ; Y. Iwasa ; H. Sato ; A. Teramoto ; K. Abe
Pub. info.: Multiscale, multifunctional and functionally graded materials : selected, peer reviewed papers from the 10th International Symposium on MM & FGMs, 22nd-25th September 2008, Sendai, Japan.  pp.199-204,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 631-632
6.

Conference Proceedings

Conference Proceedings
K. Watanabe ; R. Kuroda ; A. Teramoto ; S. Sugawa ; T. Ohmi
Pub. info.: Physics and Chemistry of SiO2 and the Si-SiO2 Interface-5.  pp.147-160,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(1)
7.

Conference Proceedings

Conference Proceedings
M. Higuchi ; A. Teramoto ; M. Komura ; S. Shinagawa ; E. Ikenaga ; H. Nohira ; K. Kobayashi ; T. Hattori ; S. Sugawa ; T. Ohmi
Pub. info.: Physics and Chemistry of SiO2 and the Si-SiO2 Interface-5.  pp.267-276,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(1)
8.

Conference Proceedings

Conference Proceedings
W. Cheng ; A. Teramoto ; C. Tye ; P. Gaubert ; M. Hirayama ; S. Sugawa ; T. Ohmi
Pub. info.: Silicon-on-insulator technology and devices 13.  pp.101-106,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(4)
9.

Conference Proceedings

Conference Proceedings
R. Kuroda ; A. Teramoto ; W. Cheng ; S. Sugawa ; T. Ohmi
Pub. info.: Silicon-on-insulator technology and devices 13.  pp.113-120,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(4)
10.

Conference Proceedings

Conference Proceedings
M. Morita ; K. Nakamura ; A. Teramoto ; K. Makihara ; T. Ohmi
Pub. info.: Proceedings of the Symposia on Interconnects, Contact Metallization, and Multilevel Metallization and Reliability for Semiconductor Devices, Interconnects, amd Thin Insulator Materials.  pp.451-460,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-25