Adhesion Properties of PMSSQ-Based Low Dielectric Constant Films by Modified Edge Lift-Off Test

Adhesion Properties of PMSSQ-Based Low Dielectric Constant Films by Modified Edge Lift-Off Test

著者名:

Kim, Y.D.

掲載資料名:

Thin film materials, processes, and reliability : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2001-24

発行年:

2001

開始ページ:

185

終了ページ:

192

総ページ数:

8

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773577 [1566773571]

言語:

英語

請求記号:

E23400/200124

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014028
シリーズID:	PA00000028
会議名:	International symposium on thin film materials, processes, and reliability ; Meeting of The Electrochemical Society ; Annual Meeting of the International Society of Electrochemistry
回次:	2001 ; 200th ; 52nd
会議開催地:	San Francisco, CA, USA
会議開催年:	2001.09.02-2001.09.07

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