
Experimental verification of improved printability for litho-driven designs [6156-25]
- Author(s):
Van Wingerden, J. ( Philips Research Europe (Belgium) ) Le Cam, L. ( Philips Semiconductors (France) ) Wientjes, R. ( Philips Semiconductors CTO (Netherlands) ) Benndorf, M. ( Philips Research Europe (Belgium) ) Trouiller, Y. ( CEA-LETI (France) ) Belledent. J. ( Philips Semiconductors (France) ) Morton, R. ( Philips Semiconductors (France) ) Aksenov, Y. ( Philips Research Europe (Belgium) ) - Publication title:
- Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6156
- Pub. Year:
- 2006
- Page(from):
- 61560O
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461995 [0819461997]
- Language:
- English
- Call no.:
- P63600/6156
- Type:
- Conference Proceedings
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