
Dry etching characteristics of attenuated phase-shifting masks using Cl2/CF4/O2/He plasmas
- Author(s):
Choi,S.J. ( PKL ) Cha,H.-S. Yoon,S.-Y. Jung,S.-M. Choi,S.-S. Jeong,S.-H. - Publication title:
- 21st Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4562
- Pub. Year:
- 2001
- Vol.:
- 4562
- Pt.:
- Two of Two Parts
- Page(from):
- 561
- Page(to):
- 570
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442901 [0819442909]
- Language:
- English
- Call no.:
- P63600/4562
- Type:
- Conference Proceedings
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