Blank Cover Image

Electrostatic discharge/electrical overstress susceptibility in MEMS: a new failure mode

Author(s):
Walraven,J.A.
Soden,J.M.
Tanner,D.M.
Tangyunyong,P.
Cole Jr.,E.I.
Anderson,R.E.
Irwin,L.W.
2 more
Publication title:
MEMS Reliability for Critical Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4180
Pub. Year:
2000
Page(from):
30
Page(to):
39
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438362 [0819438367]
Language:
English
Call no.:
P63600/4180
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Backside preparation and failure analysis for packaged microelectromechanical systems (MEMS)

Walraven, J.A., Cole, E.l., Barr, Jr.D.L., Anderson, R.E., Kilgo, A., Maciel, J.J., Morrison, R., Karabudak, N.N.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Linkage design effect on the reliability of surface-micromachined microengines driving a load

Tanner,D.M., Peterson,K.A., Irwin,L.A., Tangyunyong,P., Miller,W.M., Eaton,W.P., Smith,N.F., Rodgers,M.S.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)

Walraven,J.A., Cole Jr.,E.I., Sloan,L.R., Hietala,S.L., Tigges,C.P., Dyck,C.W.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Anodic oxidation-induced delamination of the SUMMiT poly 0 to Silicon Nitride Interface

Plass, R.A., Walraven, J.A., Tanner, D.M., Sexton, F.W.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Selective W for coating and releasing MEMS devices

Mani, S. S., Fleming, J. G., Sniegowski, J. J., Boer, M. P. de, Irwin, L. W., Walraven, J. A., Tanner, D. M., LaVan, D. …

MRS-Materials Research Society
9 Conference Proceedings Chemical vapor deposition coating for micromachines

Mani, S. S., Fleming, J. G., Sniegowski, J. J., Boer, M. P. de, Irwin, L. W., Walraven, J. A., Tanner, D. M., Dugger, M. …

MRS-Materials Research Society
4 Conference Proceedings Failure analysis of worn surface-micromachined microengines

Walraven,J.A., Headley,T.J., Campbell,A.N., Tanner,D.M.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Failure analysis of tungsten-coated polysilicon micromachined microengines

Walraven,J.A., Mani,S.S., Fleming,J.G., Headley,T.J., Kotula,P.G., Pimentel,A.A., Rye,M.J., Tanner,D.M., Smith,N.F.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Characterization techniques for surface-micromachined devices

Eaton,W.P., Smith,N.F., Irwin,L.W., Tanner,D.M.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Failure analysis of a multi-degree-of-freedom spatial microstage

Walraven, J.A., Jokiel, B. Jr.,

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Characterization techniques for surface-micromachined devices

Eaton,W.P., Smith,N.F., Irwin,L.W., Tanner,D.M.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Resonant frequency method for monitoring MEMS fabrication

Tanner, D.M., Owen, A.C., Rodriguez, F. Jr.,

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12