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Failure analysis of worn surface-micromachined microengines

Author(s):
Publication title:
MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3880
Pub. Year:
1999
Page(from):
30
Page(to):
39
Pub. info.:
Bellingham, Washington: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434777 [0819434779]
Language:
English
Call no.:
P63600/3880
Type:
Conference Proceedings

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