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Inductively-Coupled Plasma Etching of NiFe and NiFeCo

Author(s):
Jung, K. B.
Childress, J. R.
Pearton, S. J.
Jenson, M.
Hurst, A. T., Jr.
Johnson, D.
1 more
Publication title:
High-density magnetic recording and integrated magneto-optics, materials and devices : symposium held April 12-16, 1998, San Francisco, California, U.S.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
517
Pub. Year:
1998
Page(from):
79
Pub. info.:
Warrendale, Penn: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994232 [1558994238]
Language:
English
Call no.:
M23500/517
Type:
Conference Proceedings

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