
Chemical vapor deposition coating for micromachines
- Author(s):
Mani, S. S. Fleming, J. G. Sniegowski, J. J. Boer, M. P. de Irwin, L. W. Walraven, J. A. Tanner, D. M. Dugger, M. T. - Publication title:
- New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 616
- Pub. Year:
- 2000
- Page(from):
- 21
- Pub. info.:
- Warrendale, PA: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995246 [1558995242]
- Language:
- English
- Call no.:
- M23500/616
- Type:
- Conference Proceedings
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