
Deposition of PZT thin films by pulsed laser ablation for MEMS application
- Author(s):
- Maeda,R. ( Mechanical Engineering Lab. (Japan) )
- Kikuchi,K.M. ( Mechanical Engineering Lab. (Japan) )
- Schroth,A. ( Mechanical Engineering Lab. (Japan) )
- Umezawa,A. ( Mechanical Engineering Lab. (Japan) )
- Masumoto,S. ( Mechanical Engineering Lab. (Japan) )
- Publication title:
- Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3242
- Pub. Year:
- 1997
- Page(from):
- 372
- Page(to):
- 379
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426802 [0819426806]
- Language:
- English
- Call no.:
- P63600/3242
- Type:
- Conference Proceedings
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