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Frontiers of characterization and metrology for nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Gaithersburg, Maryland, 27-29 March 2007

責任表示:
editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.]
シリーズ名:
AIP conference proceedings
シリーズ巻号:
931
出版情報:
New York: American Institute of Physics, 2007
ISSN:
0094243X
ISBN:
9780735404410 [0735404410]
請求記号:
A08800/931
資料種別:
国際会議録
巻号一覧
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類似資料:

SPIE - The International Society of Optical Engineering

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