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Radio frequency power in plasmas : 16th Topical Conference on Radio Frequency Power in Plasmas, Park City, Utah 11-13 April 2005

責任表示:
editors, Stephen J. Wukitch, Paul T. Bonoli
シリーズ名:
AIP conference proceedings
シリーズ巻号:
787
出版情報:
New York: American Institute of Physics, 2005
ISSN:
0094243X
ISBN:
9780735402768 [0735402760]
請求記号:
A08800/787
資料種別:
国際会議録
巻号一覧
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