
Radio frequency power in plasmas : 15th Topical Conference on Radio Frequency Power in Plasmas, Moran, Wyoming 19-21 May 2003
- 責任表示:
- editor, Cary B. Forest
- シリーズ名:
- AIP conference proceedings
- シリーズ巻号:
- 694
- 出版情報:
- New York: American Institute of Physics, 2003
- ISSN:
- 0094243X
- ISBN:
- 9780735401587 [0735401586]
- 請求記号:
- A08800/694
- 資料種別:
- 国際会議録
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