Characterization and metrology for ULSI technology : 2000 international conference, Gaithersburg, Maryland, 26-29 June 2000
- 責任表示:
- editors David G. Seiler ... [et al.]
- シリーズ名:
- AIP conference proceedings
- シリーズ巻号:
- 550
- 出版情報:
- New York: American Institute of Physics, 2001
- ISSN:
- 0094243X
- ISBN:
- 9781563969676 [156396967X]
- 請求記号:
- A08800/550
- 資料種別:
- 国際会議録
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