Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland March 1998 | 東京科学大学図書館資料名データベース

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Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland March 1998

責任表示:: editors David G. Seiler ... [et al.]
シリーズ名:: AIP conference proceedings
シリーズ巻号:: 449
出版情報:: New York: American Institute of Physics, 1998
ISSN:: 0094243X
ISBN:: 9781563968679 [1563968673]
請求記号:: A08800/449
資料種別:: 国際会議録

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詳細

TDL書誌ID:	ZA00061865
シリーズＩＤ:	PA00000262
会議名:	International Conference on Characterization and Metrology for ULSI Technology
回次:	1998
会議開催地:	Gaithersburg, MD, USA
会議開催年:	1998.03.23-1998.03.27

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