Radio frequency power in plasmas : 12th Topical Conference : Savannah, GA April 1997
- 責任表示:
- editors, Philip M. Ryan, Thomas Intrator
- シリーズ名:
- AIP conference proceedings
- シリーズ巻号:
- 403
- 出版情報:
- New York: American Institute of Physics, 1997
- ISSN:
- 0094243X
- ISBN:
- 9781563967092 [156396709X]
- 請求記号:
- A08800/403
- 資料種別:
- 国際会議録
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