
Radio frequency power in plasmas : Tenth Topical Conference, Boston, MA, April 1993
- 責任表示:
- editors, Miklos Porkolab, Joel Hosea
- シリーズ名:
- AIP conference proceedings
- シリーズ巻号:
- 289
- 出版情報:
- New York: American Institute of Physics, 1994
- ISSN:
- 0094243X
- ISBN:
- 9781563962646 [1563962640]
- 請求記号:
- A08800/289
- 資料種別:
- 国際会議録
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