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Imaging and illumination for metrology and inspection : 2-4 November 1994, Boston, Massachusetts

責任表示:
Donald J. Svetkoff, chair
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2348
出版情報:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers, 1995
ISSN:
0277786X
ISBN:
9780819416834 [0819416835]
請求記号:
P63600/2348
資料種別:
国際会議録
巻号一覧
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