Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas | 東京工業大学附属図書館資料名データベース

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Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas

責任表示:: Anant G. Sabnis, chair
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 2336
出版情報:: Bellingham, WA: Society of Photo-optical Instrumentation Engineers, 1994
ISSN:: 0277786X
ISBN:: 9780819416698 [081941669X]
請求記号:: P63600/2336
資料種別:: 国際会議録

巻号一覧

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詳細

TDL書誌ID:	ZA00057539
シリーズＩＤ:	PA00000029
会議名:	Symposium on manufacturing process control for microelectronic devices and circuits
回次:	1994
会議開催地:	Austin, TX, USA
会議開催年:	1994.10.20-1994.10.21

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