Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas
- 責任表示:
- Fusen E. Chen, Shyam P. Murarka, chairs
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2335
- 出版情報:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers, 1994
- ISSN:
- 0277786X
- ISBN:
- 9780819416681 [0819416681]
- 請求記号:
- P63600/2335
- 資料種別:
- 国際会議録
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