12th Annual Symposium on Photomask Technology and Management : 23-24 September 1992, Sunnyvale, California

責任表示:

sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

1809

出版情報:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers, 1993

ISSN:

0277786X

ISBN:

9780819410092 [0819410098]

請求記号:

P63600/1809

資料種別:

国際会議録