Dry etch technology : 9-10-September 1991, San Jose, California
- 責任表示:
- Deepak Ranadive, chair ; sponsored and published by SPIE--the International Society for Optical Engineering
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 1593
- 出版情報:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers, 1992
- ISSN:
- 0277786X
- ISBN:
- 9780819407245 [0819407240]
- 請求記号:
- P63600/1593
- 資料種別:
- 国際会議録
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