Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California
- 責任表示:
- Leonard J. Brillson, Fred H. Pollak, chairs
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 1186
- 出版情報:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers, 1990
- ISSN:
- 0277786X
- ISBN:
- 9780819402226 [0819402222]
- 請求記号:
- P63600/1186
- 資料種別:
- 国際会議録
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Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California
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