Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands

責任表示:

Harry L. Stover, Steven Wittekoek, chairs

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

811

出版情報:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers, 1987

ISSN:

0277786X

ISBN:

9780892528462 [089252846X]

請求記号:

P63600/811

資料種別:

国際会議録