Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida | 東京工業大学附属図書館資料名データベース

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Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida

責任表示:: Sayan D. Mukherjee, editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 797
出版情報:: Bellingham, WA: Society of Photo-optical Instrumentation Engineers, 1987
ISSN:: 0277786X
ISBN:: 9780892528325 [089252832X]
請求記号:: P63600/797
資料種別:: 国際会議録

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詳細

TDL書誌ID:	ZA00056043
シリーズＩＤ:	PA00000029
会議名:	Symposium on advanced processing of semiconductor devices
回次:	1987
会議開催地:	Bay Point, FL, USA
会議開催年:	1987.03.23-1987.03.25

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