Advanced applications of ion implantation : January 23-25, 1985, Los Angeles, California
- 責任表示:
- Michael I. Current, Devendra K. Sadana, chairmen
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 530
- 出版情報:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers, 1985
- ISSN:
- 0277786X
- ISBN:
- 9780892525652 [0892525657]
- 請求記号:
- P63600/530
- 資料種別:
- 国際会議録
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