Technological advances in micro and submicro photofabrication imagery : [seminar], August 21-23, 1974, San Diego, California

責任表示:

editors, J. M. Graf, William Converse

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

55

出版情報:

Washington, D.C.: Society of Photo-optical Instrumentation Engineers, 1975

ISSN:

03610748

ISBN:

9780892520671 [0892520671]

請求記号:

P63600/55

資料種別:

国際会議録