
NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS June 26- July 1, 2011, Suntec, Singapore
- 責任表示:
- MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS
- シリーズ名:
- Advanced materials research
- シリーズ巻号:
- 254
- 出版情報:
- Stafa-Zuerich, Switzerland: Trans Tech Publications, 2011
- ISSN:
- 10226680
- ISBN:
- 9783037851456 [3037851457]
- 請求記号:
- A25118/254
- 資料種別:
- 国際会議録