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NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS June 26- July 1, 2011, Suntec, Singapore

責任表示:
MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS
シリーズ名:
Advanced materials research
シリーズ巻号:
254
出版情報:
Stafa-Zuerich, Switzerland: Trans Tech Publications, 2011
ISSN:
10226680
ISBN:
9783037851456 [3037851457]
請求記号:
A25118/254
資料種別:
国際会議録
巻号一覧
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