NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July 2009, Singapore
- 責任表示:
- MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July 2009, Singapore
- シリーズ名:
- Advanced materials research
- シリーズ巻号:
- 74
- 出版情報:
- Stafa-Zuerich, Switzerland: Trans Tech Publications, 2009
- ISSN:
- 10226680
- ISBN:
- 9780878493210 [0878493212]
- 請求記号:
- A25118/74
- 資料種別:
- 国際会議録