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NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July 2009, Singapore

責任表示:
MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July 2009, Singapore
シリーズ名:
Advanced materials research
シリーズ巻号:
74
出版情報:
Stafa-Zuerich, Switzerland: Trans Tech Publications, 2009
ISSN:
10226680
ISBN:
9780878493210 [0878493212]
請求記号:
A25118/74
資料種別:
国際会議録
巻号一覧
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