Silicon science and advanced micro-device engineering II : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering, December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan

責任表示:

edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura

シリーズ名:

Key engineering materials

シリーズ巻号:

497

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications, 2012

ISSN:

10139826

請求記号:

K32200

資料種別:

国際会議録