Technology evolution for silicon nano-electronics : selected, peer reviewed papers from the proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 2010, June 3-5, 2010, Tokyo Institute of Technology, Tokyo, Japan

責任表示:

edited by Seiichi Miyazaki and Hitoshi Tabata

シリーズ名:

Key engineering materials

シリーズ巻号:

470

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications, 2011

ISSN:

10139826

請求記号:

K32200

資料種別:

国際会議録