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Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA

責任表示:
Vivek K. Singh, Michael L. Rieger, editors ; sponsored by SPIE ; cooperating organization, SEMATECH (USA)
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6925
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers, 2008
ISSN:
0277786X
ISBN:
9780819471109 [0819471100]
請求記号:
P63600/6925
資料種別:
国際会議録
巻号一覧
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