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Reliability, packaging, testing, and characterization of MEMS/MOEMS VII : 21-22 January 2008, San Jose, California, USA

責任表示:
MOEMS VII : 21-22 January 2008, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6884
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers, 2008
ISSN:
0277786X
ISBN:
9780819470591 [0819470597]
請求記号:
P63600/6884
資料種別:
国際会議録
巻号一覧
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