EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany
- 責任表示:
- Uwe F.W. Behringer, chair
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6792
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers, 2008
- ISSN:
- 0277786X
- ISBN:
- 9780819469564 [0819469564]
- 請求記号:
- P63600/6792
- 資料種別:
- 国際会議録
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