Two- and three-dimensional methods for inspection and metrology V : 11-12 September 2007, Boston, Massachusetts, USA
- 責任表示:
- Peisen S. Huang, editor ; sponsored and published by by SPIE
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6762
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers, 2007
- ISSN:
- 0277786X
- ISBN:
- 9780819469229 [081946922X]
- 請求記号:
- P63600/6762
- 資料種別:
- 国際会議録
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