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Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues

責任表示:
editors, S. Kar ... [et al.] ; sponsoring divisions: Dielectric Science and Technology, Electronics
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-28
出版情報:
Pennington, NJ: Electrochemical Society, 2002
ISSN:
01616374
ISBN:
9781566773959 [1566773954]
請求記号:
E23400/200228
資料種別:
国際会議録
巻号一覧
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