Proceedings of the Symposium on Electrochemically Deposited Thin Films
- 責任表示:
- edited by Milan Paunovic, Izumi Ohno, Yasuhiko Miyoshi ; [sponsored by the] Electrodeposition Division
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1993-26
- 出版情報:
- Pennington, NJ: Electrochemical Society, 1993
- ISSN:
- 01616374
- ISBN:
- 9781566770613 [1566770610]
- 請求記号:
- E23400/940141
- 資料種別:
- 国際会議録
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11
国際会議録
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
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