Proceedings of the Symposia on Interconnects, Contact Metallization, and Multilevel Metallization and Reliability for Semiconductor Devices, Interconnects, amd Thin Insulator Materials

責任表示:

edited by T.O. Herndon, H.S. Rathore ... [et al.] ; [sponsored by the] Dielectric Sicence and Technology and Electronics Divisions

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

1993-25

出版情報:

Pennington, NJ: Electrochemical Society, 1993

ISSN:

01616374

ISBN:

9781566770675 [156677067X]

請求記号:

E23400/940140

資料種別:

国際会議録