Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.
- 責任表示:
- editors: Ashok Kumar ... [et al.]
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 1157
- 出版情報:
- Warrendale, Pa.: Materials Research Society, 2010
- ISSN:
- 02729172
- ISBN:
- 9781605111308 [1605111309]
- 請求記号:
- M23500/1157
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society | |
Materials Research Society | |
Materials Research Society | |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |