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CMOS gate-stack scaling--materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A.

責任表示:
editors: Alexander A. Demkov ... [et al.]
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1155
出版情報:
Warrendale, Pa.: Materials Research Society, 2009
ISSN:
02729172
ISBN:
9781605111285 [1605111287]
請求記号:
M23500/1155
資料種別:
国際会議録
巻号一覧
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