
Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.
- 責任表示:
- editors, Srikar Vengallatone ... [et al.]
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 1139
- 出版情報:
- Warrendale, Pa.: Materials Research Society, 2009
- ISSN:
- 02729172
- ISBN:
- 9781605111117 [1605111112]
- 請求記号:
- M23500/1139
- 資料種別:
- 国際会議録
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